About Advanced Vacuum
(Manufactured Products)

Advanced Vacuum, a Plasma-Therm company since 2011, has long been known as a manufacturer of high-quality, economical open-load and load-lock plasma processing solutions. AV systems are installed around the world in commercial R&D labs, as well as in academic, scientific, and production facilities. The Advanced Vacuum Vision Series and the Takachi Series product lines deliver the full range of plasma process technologies, including RIE, ICP, PE, PECVD, and PVD.

Advanced Vacuum’s robust, low-cost solutions are now integrated with Plasma-Therm’s advanced control systems, including Cortex®, our proven process development expertise, and our worldwide service and support organization.

Advanced Vacuum Products


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