About Advanced Vacuum
(Manufactured Products)

Advanced Vacuum, a Plasma-Therm company since 2011, has long been known as a manufacturer of high-quality, economical open-load and load-lock plasma processing solutions. AV systems are installed around the world in commercial R&D labs, as well as in academic, scientific, and production facilities. The Advanced Vacuum Vision™ and Apex™ product lines deliver the full range of plasma process technologies, including RIE, ICP, PE, PECVD, and PVD.

Advanced Vacuum’s robust, low-cost solutions are now integrated with Plasma-Therm’s advanced control systems, including Cortex®, our proven process development expertise, and our worldwide service and support organization.

Advanced Vacuum Products


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