Solid-State Lighting

With the phase-out of inefficient incandescent lighting and continued energy-saving initiatives, demand for solid-state lighting has never been greater. The electroluminescence from GaN-based compound semiconductors has provided the foundation for a new lighting industry based on high-brightness LEDs.

Plasma-Therm has been a supplier to the leading LED manufacturers for more than 15 years. With expertise in etching gallium nitride (GaN), patterned sapphire substrates (PSS) and silicon carbide (SiC), as well as deposition of silicon oxide (SiO2) and nitride (SiNx), Plasma-Therm has partnered with  established industry leaders and with smaller, pioneering companies.

The Plasma-Therm product line includes equipment for R&D through high-volume production. Innovative solutions for single wafer and batch clamping provide cutting-edge etch-rate performance. In addition, long maintenance intervals are standard with a closed-loop temperature-controlled source. Low maintenance contributes to a low cost of ownership for Plasma-Therm systems.

Typical Applications

• Etch
• GaN etch
• SiC
• PSS (patterned sapphire substrate)
• AlGaInP (and related materials)
• GaP

• Deposition
• SiNx PECVD stress controlled at high rates with excellent conformality
• SiO2—High breakdown voltage, low stress, low temperature

• Strip
• Low-temperature PR stripping
• High-temperature stripping

Products

• VERSALINE
• LAPECVD
• Vision Series
• Apex SLR
• Singulator™
• Odyssey HDRF™
• HDRF™
• NEO
• CORIAL Series