Read more customer experiences from staff at Carnegie Mellon University and PCB Piezotronics.

It's always gratifying to hear from customers who recognize Plasma-Therm's commitment to providing excellent service. Here are just some of the most recent comments we've received from customers around the world:

“We recently received a service visit from Mike. He is knowledgeable, friendly and worked well with everyone he interacted with. He helped us on the issue he was called out for and another that came up during his visit. While we do not want to call for service, the next time we do, we would be happy to see Mike again.”


Equipment Engineer

‘Great work ethic’

A facilities manager sent along his thanks following the installation of an Apex ICP system: “…I commend [your FSE] for his knowledge, patience and great work ethic.”


Facilities Manager, Rochester Institute of Technology

‘Extremely knowledgeable’

"…Michael did a fantastic job while he was here. He was very thorough, very professional and extremely knowledgeable… he found and repaired an issue that we had extensively investigated and were unable to resolve. Michael is an ambassador who does everything to enhance the reputation of excellence that [Plasma-Therm] holds in our hearts and minds… It is no wonder that PT continually receives the highest “VLSIresearch” awards…"


Senior Project Manager – Microoptics

"We have been using Inductively coupled plasma reactive ion etching (ICP-RIE) system APEX SLR from Advanced Vacuum Systems AB (a Plasma-Therm company) for controlled nanoscale etching of Si, SiO2, Si3N4, W, Mo and polymers (resists) with fluorine-based chemistry for 2 years now and we think that this tool is the best option for nanoscale etching for such research and development university lab as Lund Nano Lab. Recently we have bought another similar APEX SLR tool for chlorine-based dry etching. These two tools will provide us with all necessary nanoscale dry etching capabilities in the near future and are happy to recommend these tools.,"


Division of Solid State Physics and NanoLund, Lund University

'enthusiastic support'

“I wanted to thank Plasma-Therm for the response and the support this last week. The team you sent responded well, and together with [a partner supplier] seems to have put us on a great path....Plasma-Therm’s enthusiastic support validates the decision we made to have you as such an important part of our equipment supply base.”


U.S. Specialty Fab Manager

"Thank you for your relentless support, you were a great help. We simply followed the logical problem solving tactics. Sincerely, I must say that your team are some of the best support staff that I have ever worked with. Congrats to Plasma-Therm."


Wafer-Fab Equipment Maintenance Engineer

A process team member at an Asian fab thanked the customer support team for its focus and quick response:

“We acquired another tool sign-off today and would thus like to write to you as an expression of my satisfaction with the support and extraordinarily fast response that Plasma-Therm and [local dealer] Dymek Technical Team has been providing us....What differentiates your team from others is that your FSE [Field Service Engineers] are all extremely well equipped in terms of knowledge and also all are well versed in an array of different skills which complement each other specifically when they begin to work as a unit in order to troubleshoot certain major issues.”


Process Engineer

'...couldn't be happier...'

"I hope you don’t mind that I sent out a copy of your e-mail to a competitor of yours... We have two older systems of [theirs]...I have been trying for 9 months now to get him to tell me what their new revisions of software will fix or enhance and I just keep getting the run around. Now here you guys send out this notification of a new release with all the fixes and enhancements and I didn’t have to ask for it. WOW! I just wanted him to see how software upgrades and releases should be handled.

"You guys in Customer Support are doing a great job and we couldn’t be happier with the service you guys have given us here... Special thanks to Pete Telford and his guys too for quick response and excellent service too."

University lab engineer

Cambridge, Mass.

An engineer had a tool down because of a bad turbo pump, and had trouble getting a replacement. Plasma-Therm's Paul Sadlek and our customer support team worked to find a replacement — even though it was a competitor's tool.

“I would like to personally thank you for tracking down and selling us the MAG900CT turbo and turbo converter. I have installed it on the [competitor's] DRIE and all appears to be functioning well. Please extend my thanks to anyone else at Plasma-Therm for tracking down this pump and expediting the delivery. Your help is much appreciated and we are very happy to do business with you and the PlasmaTherm team.”


Fulton School of Engineering, Arizona State University

"As always, I appreciate your quick response. Thanks for taking such great care of us."

LED process engineer


"I have attached the FAT acceptance form....Thanks for all the help. This is just another step in a positive direction for [our companies'] teaming.  I already look forward to the next system purchase."  


Aerospace manufacturer

"Thanks for the follow-up. Thomas gave us a very thorough training of the software and hardware on the system. Now that we have a true understating of the system, we are very satisfied. This is a really nice system and I would highly recommend it to other companies."


Research laboratory, Pasadena, Calif.

"Thanks for all of the excellent help and quick response.  You guys are always easy to work with and have a great team!"


Telecommunications systems manufacturer

Prompt to respond

A university nanotechnology lab engineer appreciates that Plasma-Therm customer support personnel are highly available:

“It is always nice to know that you are directly reachable and that you also are prompt to respond to voicemail and email messages, even if the response comes well outside of normal business hours.  This week alone I was receiving email responses at 11 pm and received phone calls late in the evening and very early morning....I can always count on you to help out whenever you can....Thanks again for everything you do!"

Ithaca, N.Y.




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